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Successful semiconductor fabrication takes more than just the best equipment available.

Successful semiconductor fabrication takes more than just the best equipment available. It also takes people who are well trained in the proper skills. Canon's National Training Department can provide the educational expertise to bring you up to the level of high competency required for fabs to compete successfully in the dynamic and demanding semiconductor marketplace.

Course No.: FPA-3000i4    
Course Title: FPA-3000i4 Operation Course    
Days: Self-paced    
Applicable Models: i4, iW, i5, i5+    
Schedule: Available now

The FPA 3000i4 Operation Online Training Course is user friendly and perfect for self-paced learning. This User Friendly Canon Stepper Operation Training offers unit description, operation and system calibration information related to the industry leading Canon Stepper systems.

For More Information Call: 1-408-468-2141
  
Features of the Canon Stepper Online Training  

  • Photo quality 3D graphics. Unit description and system explanations 
  • 3D animation demonstrating unit operation
  • Detailed system calibration explanation and operation instructions• Animations demonstrating calibration functions 
  • Software and unit operation simulations
  • Interactive menu operations
  • Hyperlink glossary

Email Contact - semi-info@cusa.canon.com

Course No.: FPA-3000Ex5    
Course Title: FPA-3000EX5 Operation Course    
Days: Self-paced    
Applicable Models: EX3, EX4, EX5, EX6    
Schedule: Available now

The FPA 3000EX5 Operation Online Training Course is user friendly and perfect for self-paced learning. This User Friendly Canon Stepper Operation Online Training offers unit description, operation and system calibration information related to the industry leading Canon Stepper systems.

For More Information Call: 1-408-468-2141 

Features of the Canon Stepper Online Training

  • Photo quality 3D graphics
  • Unit description and system explanations
  • 3D animation demonstrating unit operation
  • Detailed system calibration explanation and operation instructions
  • Animations demonstrating calibration functions
  • Software and unit operation simulations
  • Interactive menu operations - Hyperlink glossary

Email Contact - semi-info@cusa.canon.com

Course No.: FPA-5000ES2/ES3
Course Title: FPA-5000ES2/ES3 Operation Course
Days: Self-paced    
Applicable Models: All 5000 Series scanners    
Schedule: Available now

The FPA 5000 ES2/ES3 Scanner Operation Online Training Course is User Friendly and perfect for self-paced learning. This training offers unit description, operation and system calibration information related to the industry leading Canon Scanner systems.

For More Information Call: 1-408-468-2141 

Features of the Canon Scanner Online Training

  • Photo quality 3D graphics. Unit description and system explanations
  • 3D animation demonstrating unit operation
  • Detailed system calibration explanation and operation instructions
  • Animations demonstrating calibration functions
  • Software and unit operation simulations
  • Interactive menu operations
  • Hyperlink glossary. Print capability
  • Search functionality
  • User defined study guide
  • Online and offline operation
  • Real-time training status information
  • Online testing and reporting

Email Contact - semi-info@cusa.canon.com

Course No.: F3001
Course Title: Intro to Parameters & Commands    
Days: 5    
Applicable Models: All 3000 Series steppers    
Schedule: Please call 1-408-468-2000 for schedule.

 

Introduction

This five-day course is designed to provide the student with an introduction to the software for the FPA 3000 Series steppers. The primary goal of this course is to provide the student with the basic software knowledge required to maintain the stepper under normal conditions. This course also provides the student with the knowledge and skills recommended for progression to applications training.
  
Performance Objectives

  • Computer System Configuration
  • Navigating the Software Structure
  • Creating Reticle Files
  • Creating Job Files and Define Related Parameters
  • Review System Parameters
  • Define Most Common Used Commands

 
  
Prerequisites

FPA 3000i4 Operations Online Training Course 

 

Applicable Models

All 3000 Series steppers 


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F3002A
Course Title: Alignment    
Days: 5    
Applicable Models: All 3000 Series steppers    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This five-day course is designed to provide the students with in-depth explanation on the alignment system of the FPA-3000 Series steppers. The primary goal is to provide the student with the knowledge required to maintain and optimize the stepper alignment performance.

  
Performance Objectives

  • Basics of TVPA
  • Parameters of TVPA
  • TVPA sequence
  • TVPA tuning
  • Basics of AGA
  • AGA compensation mode
  • GAUS
  • Alignment error calculations
  • AGA abnormality check
  • Calibration command
  • AGA optimization
  • Mix & match overlay
  • AGA multi spot measurements
  • XY simultaneous measurement AGA

 
  
Prerequisites

FPA 3000i4 Operations Online Training and F3001 Introduction to Parameters & Commands (Stepper Software)


Applicable Models

All 3000 Series steppers


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F3002F
Course Title: Focus and Tilt
Days: 4    
Applicable Models: All 3000 Series steppers    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This four-day course is designed to provide the students with in-depth explanation on the focus system of the FPA-3000 Series steppers. The primary goal is to provide the student with the knowledge required to maintain and optimize the stepper focus performance.

  
Performance Objectives

  • Basics of focus and tilt
  • Focus calibration functions
  • Focus and tilt daily management
  • Focus, tilt system offset
  • Focus, tilt control
  • FOM

 

Prerequisites

FPA 3000i4 Operations Online Training and F3001 Introduction to Parameters & Commands (Stepper Software)

 

Applicable Models

All 3000 Series steppers


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F3003
Course Title: Stage Evaluation and Troubleshooting
Days: 4    
Applicable Models: i4, iW, EX3    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This four-day course is designed to provide the students with an introduction to the hardware of the air bearing stage and focus system of FPA-3000 Series steppers. The primary goal of this course is to provide the students with the basic knowledge of trouble analysis of these sub-components.

  
Performance Objectives

  • X-Y stage pressure and vacuum check
  • X-Y stage resistance check
  • X-Y stage background vibration analysis
  • Visual inspection of main unit interference
  • X-Y stage frequency response test
  • X-Y stage gain adjustment and T(mean), EGP measurement check
  • Coil resistance check
  • OPTF unit trouble analysis
  • Theta-Z tilt unit piezo replacement
     

  
Prerequisites

FPA 3000 i4 Operations Online Training course and F3006


Applicable Models

i4, EX3, iW


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F3004I
Course Title: i-line Illumination System
Days: 4    
Applicable Models: i4, iW, i5, i5+    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This four-day course introduces the student to repair, maintenance, and adjustment procedures for the i-line illuminator system for 3000 Series steppers.

  
Performance Objectives

  • System overview
  • Intensity and uniformity
  • Intensity degradation checks
  • Illumination system calibration
  • Uniformity degradation checks
  • FRA intensity degradation check
  • Exposure shutter replacement
     

  
Prerequisites

FPA 3000 i4 Operations Online Training course and F3006 Periodic Maintenance


Applicable Models

i4, iW, i5, i5+


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F3004R
Course Title:
Reticle Changer

Days: 3    
Applicable Models: All 3000 Series steppers    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This three-day course introduces the student to repair, maintenance, and adjustment procedures for the reticle changer system for 3000 Series steppers.

  
Performance Objectives

  • Component description
  • Manual operation
  • Position checks and adjustment
  • Robot replacement
  • XYZ sensor adjustment
     

  
Prerequisites

FPA 3000 i4 Operations Online Training course and F3006 Periodic Maintenance


Applicable Models

All 3000 Series steppers


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F3004W
Course Title: Wafer Feeder
Days: 3
Applicable Models: All 3000 Series steppers    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This three-day course introduces the student to repair, maintenance, and adjustment procedures for the wafer feeder system for 3000 Series steppers.

  
Performance Objectives

  • Component description
  • Manual operation
  • Position checks and adjustment
  • Robot replacement


  
Prerequisites

FPA 3000 i4 Operations Online Training course and F3006 Periodic Maintenance

 

Applicable Models

All 3000 Series steppers


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F3005X
Course Title: Stage Evaluation and Troubleshooting
Days: 4
Applicable Models: i5, i5+, EX4, EX5, EX6    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This four-day course is designed to provide the students with an introduction to the hardware of the FLAT stage of the FPA-3000 Series steppers. The primary goal of this course is to provide the students with the basic knowledge of trouble analysis of the FLAT stage sub-components.
  
Performance Objectives

  • X-Y stage pressure and vacuum check
  • X-Y stage resistance check
  • X-Y stage background vibration analysis
  • Visual inspection of main unit interference
  • T(mean), EGP measurement check
  • Bellows diaphragm adjustment (STGM)
  • Bellow leak check
  • Bellow hysteresis waveform
  • Coil resistance check

 
  
Prerequisites

FPA 3000 i4 Operations Online Training Course and F3006


Applicable Models

i5, i5+, EX4, EX5, EX6


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F3006
Course Title: Periodic Maintenance
Days: 5
Applicable Models: i4, i5, i5+
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This five-day course covers machine readiness checks, consumable items replacement, and periodic maintenance of the stepper.

  
Performance Objectives

  • Machine readiness inspections and corrections
  • Stage base, reticle changer vacuum pads, and wafer feeder vacuum pads inspection and cleaning
  • Wafer flatness test and chuck cleaning
  • Inspection and maintenance of halogen, HeNe laser, and mercury light sources
  • Reticle rotation checks and update offsets
  • Auto alignment system checks and update offsets
  • Focus exposure checks and update offsets
  • Stage accuracy and matching checks and update offsets
  • C-Oil level check and replenish


  
Prerequisites

FPA 3000 i4 Operation Online Training course

 

Applicable Models

i4, i5, i5+


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F5001
Course Title: Intro to Parameters & Commands
Days: 5
Applicable Models: All 5000 Series scanners    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This five-day course is designed to provide the student with an introduction to the software for the FPA-5000 Series scanners. The primary goal of this course is to provide the student with the basic software knowledge required to maintain the scanner under normal conditions. This course also provides the student with the knowledge and skills recommended for progression to application training.

  
Performance Objectives

  • Control system
  • Screen operations
  • File manager operation
  • Reticle file parameters and creating a reticle file
  • 1st mask sequence overview, job parameters, and job writing
  • AGA sequence overview, job parameters, and job writing
  • Creating a patch job
  • Command basics
  • System parameters

 
  
Prerequisites

ES2/ES3 Scanner Operations Online Training course or F5000 ES2/ES3 Basic Fundamentals Class


Applicable Models

All 5000 Series scanners


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F5002A
Course Title: Alignment Performance
Days: 5
Applicable Models: All 5000 Series scanners    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This five-day course is designed to provide the students with in-depth explanation on the alignment system of the FPA-5000 Series scanners. The primary goal is to provide the student with the knowledge required to maintain and optimize the stepper alignment performance.

  
Performance Objectives

  • Basics of TVPA
  • Parameters of TVPA
  • TVPA sequence
  • TVPA tuning
  • Basics of AGA
  • AGA compensation mode
  • GAUS
  • Alignment error calculations
  • AGA abnormality check
  • Calibration command
  • AGA optimization
  • Mix & match overlay
  • AGA multi spot measurements
  • XY simultaneous measurement AGA
  • ABBE coefficient factor

 
  
Prerequisites

ES2/ES3 Scanner Operations Online Training course or F5000 ES2/ES3 Basic Fundamentals Class and F5001 Intro to Parameters & Commands

 

Applicable Models

All 5000 Series steppers


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F5002F
Course Title: Focus System
Days: 4
Applicable Models: All 5000 Series scanners    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This four-day course is designed to provide the students with in-depth explanation on the focus system of the FPA-5000 Series scanner. The primary goal is to provide the student with the knowledge required to maintain and optimize the scanner focus performance.

  
Performance Objectives

  • Basics of focus and tilt
  • Focus calibration functions
  • Focus and tilt daily management
  • Focus, tilt system offset
  • Focus, tilt control
  • FOM

   
Prerequisites

ES2/ES3 Scanner Operations Online Training course or F5000 ES2/ES3 Basic Fundamentals Class and F5001 Intro to Parameters & Commands


Applicable Models

All 5000 Series scanners


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F5006
Course Title: Periodic Maintenance
Days: 5
Applicable Models: All 5000 Series scanners    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This five-day course covers machine readiness check and periodic maintenance of 5000 Series scanner.

  
Performance Objectives

  • Scanner introduction
  • Illumination optimization
  • Laser axis adjustment
  • IL commands and IUC command
  • Stepping accuracy and repeatability
  • SKEW
  • Reticle scan stage calibration
  • Best focus
  • AGA exposure offset
  • Excimer laser gas information and status check

 
Prerequisites

ES2/ES3 Scanner Operations Online Training course or F5000 ES2/ES3 Basic Fundamentals Class


Applicable Models

All 5000 Series scanners


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F5500
Course Title: Unit Description and Basic Operation (e-Console)
Days: 4
Applicable Models: iZa    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This four-day course provides understanding of the unit function and basic operation of the FPA-5500 iZa system using e-Console software.

  
Performance Objectives

  • iZa System Introduction
  • iZa Unit Description
  • System Operation
  • Command Operation

  
Prerequisites

None

 

Applicable Models

iZa


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F5501
Course Title:  e-Console Recipe Creation and Parameter Description
Days: 4
Applicable Models: iZa    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This four-day course provides understanding of the 5500 body e-Console software structure, navigate standard e-Console software screens and perform e-Console operation tasks. The students will have the understanding of the Reticle, Recipe, and IL Editor parameters.

  
Performance Objectives

  • e-Console Introduction
  • e-Console Software Navigation
  • Demonstrate and description of e-Console operations
  • Reticle file operation and parameter description
  • Recipe operation and parameter description
  • System parameter explanation
  • File operation

 
  
Prerequisites

F5500 Basic Operation (e-Console)


Applicable Models

iZa


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F5506
Course Title: Consumable Replacement and Performance Checks
Days: 7
Applicable Models: iZa    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This seven-day course provides understanding of consumable replacement methods and equipment periodic maintenance checks.

  
Performance Objectives

  • Consumable Replacement Introduction
  • Consumable Replacement Exercises
  • Equipment Checks
  • Wafer Recovery

 
  
Prerequisites

F5500 Basic Operation (e-Console)

 

Applicable Models

iZa

 


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F6000
Course Title: Unit Description and Basic Operation (e-Console)
Days: 5
Applicable Models: ES6a    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This four-day course provides understanding of the unit function and basic operation of the FPA-6000 ES6a system using e-Console software.

  
Performance Objectives

  • ES6a System Introduction
  • ES6a Unit Description
  • System Operation
  • Command Operation

  
Prerequisites

None

 

Applicable Models

ES6a


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F6001
Course Title: e-Console Recipe Creation and Parameter Description
Days: 4
Applicable Models: ES6a    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This four-day course provides understanding of the 6000 body e-Console software structure, navigate standard e-Console software screens and perform e-Console operation tasks. The students will have the understanding of the Reticle, Recipe, and IL Editor parameters.

  
Performance Objectives

  • e-Console Introduction
  • e-Console Software Navigation
  • Demonstrate and description of e-Console operations
  • Reticle file operation and parameter description
  • Recipe operation and parameter description
  • System parameter explanation
  • File operation

  
Prerequisites

F6000 Basic Operation (e-Console)


Applicable Models

ES6a


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F6002
Course Title: Applications
Days: 7
Applicable Models: ES6a    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This seven-day course provides complete theory of Focus and Tilt compensation, TVPA, AGA, and Lens Performance for 6000 body scanners and parameters optimization.

  
Performance Objectives

  • 6000 Body Introduction
  • Imaging Performance
  • Alignment Performance
  • Focus Performance

 
  
Prerequisites

F6000 Basic Operation (e-Console), F6001 eConsole Recipe Creation and Parameter Description

 

Applicable Models

ES6a


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Course No.: F6006
Course Title: Consumable Replacement and Performance Checks
Days: 7
Applicable Models: ES6a    
Schedule: Please call 1-408-468-2000 for schedule.

Introduction

This seven-day course provides understanding of consumable replacement methods and equipment periodic maintenance checks.

  
Performance Objectives

  • Consumable Replacement Introduction
  • Consumable Replacement Exercises
  • Equipment Checks
  • Wafer Recovery

 
  
Prerequisites

F6000 Basic Operation (e-Console)


Applicable Models

ES6a


Course Schedule

Please call for schedule: 1-408-468-2000

Email Contact - semi-info@cusa.canon.com

Dress Code

In the interest of maintaining a safe and professional learning environment, it is required that students wear "casual business attire and closed-toed shoes while attending any Canon Semiconductor training.

Additional Information

Our classes include performance skills that must be practiced in our class 1000 cleanroom. These skills may require students to bend, kneel and stoop for extended periods of time in cleanroom "bunny suits. Appropriate attire should be worn. No shorts are allowed.

Class Cancellation

A minimum of ten working days notice is required to cancel a student from a scheduled class roster.

 

To cancel a student form a scheduled class and receive a full refund, notify the Semiconductor Training Coordinator at (408) 468-2140 or electronically at semi-info@cusa.canon.com. A student cancellation form will be sent as proof of cancellation.

 

If ten working days are not given, the amount of the class will be charged at the rate of one class credit per student, per week, or the training cost for a student, per week depending on the original form of payment.

 

The Canon Training Department is occasionally required to alter the training schedule or cancel classes. When these situations occur, effected students will be informed a minimum of ten working days prior to the class start date.

Training Credits

All formal training ("Training") will be conducted at CUSA's training facility in San Jose, California. At the Customer's option, training will be paid for through the use of training credits provided with the purchase of new equipment, or by paying the standard prevailing rate per week for each student.

 

Training Credits are issued per each new equipment purchase, and may be redeemed solely during the warranty period or up to 18 months after the delivery of equipment whichever ends first. Training Credits are not transferable*. Each Training Credit is equivalent to one week of training per person. Additional Training Credits can be purchased at the prevailing price set by CUSA's Training Department.*

 

* Training Credits are not transferable between sites, equipment model type, as well as ownership of the Training Credits to third parties.

 

Training Credits may only be used for standard training courses conducted at CUSA's San Jose, CA. Training facility. Should Customer require "on-site" training, CUSA's standard published courses may be purchased at the then current weekly training rate per person. Such training shall also be subject to charges for travel. Any preparation required shall be subject to CUSA's the current billing rates. CUSA may consider requests for customized "on-site" training class when resource materials are available. Customized "on-site" training will be quoted separately.

San Francisco International Airport
3300 North First Street
San Jose, CA 95134

  
Total Distance:    32.9 Miles
  
Estimated Total Time:    47 Minutes

Start:  Depart San Francisco International Airport
 
On Local road(s) (South-West)          0.5
1. Bear LEFT (South) onto Airport Exit          0.4
2. Continue (West) on Ramp)          0.7
3. Continue (South) on US-101 Freeway          28.9
4. Bear RIGHT (North) onto San Tomas Expressway          2.0
5. Turn LEFT (North) onto North First Street          0.2
      
End:  Arrive 3300 North First Street San Jose, CA 95134

San Jose International Airport
3300 North First Street
San Jose, CA 95134

  
Total Distance:    3.1 Miles
  
Estimated Total Time:    10 Minutes

Start:  Depart San Jose International Airport
 
On Local road(s) (North-East)          0.3
1. Turn RIGHT (South-East) onto Terminal C Acc          0.3
2. Bear LEFT (EAST) onto Airport Exit          0.3
3. Turn LEFT (North) onto Airport Blvd          0.3
4. Turn RIGHT (North-East) onto Airport Parkway          0.4
5. Continue (North-East) on East Brokaw Road          0.1
      
End:  Arrive 3300 North First Street San Jose, CA 95134

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